More Details about Foundations Of Mems, 2Nd Edition

General Information  
Author(s)Chang Liu
Edition2nd Edition
Publish YearJanuary 2011


Foundations of MEMS is an entry-level text designed to systematically teach the specifics of MEMS to an interdisciplinary audience. Liu discusses designs, materials, and fabrication issues related to the MEMS field by employing concepts from both the electrical and mechanical engineering domains and by incorporating evolving microfabrication technology — all in a time-efficient and methodical manner. A wealth of examples and problems solidify students' understanding of abstract concepts and provide ample opportunities for practicing critical thinking. Salient Features Concise background information from several engineering domains Systematic teaching of materials, design, and fabrication issues Critical-thinking challenges Extensive examples and homework problems Current data and up-to-date materials