More Details about Ion Implantation Technology 2010

General Information  
Author(s)Matsuo J
PublisherSpringer
ISBN9780735408760
Pages532
BindingHardcover
LanguageEnglish
Publish YearJanuary 2011

Description

The proceedings of 18th International conference on Ion Implantation Technology (IIT2010) covers all aspect of ion implantation, from the fundamentals of ion-solid interactions to industrial applications of the latest implantation machines and device manufacturing.