Description

The proceedings of 18th International conference on Ion Implantation Technology (IIT2010) covers all aspect of ion implantation, from the fundamentals of ion-solid interactions to industrial applications of the latest implantation machines and device manufacturing.

More Details about Ion Implantation Technology 2010

General Information  
Author(s)Matsuo J
PublisherSpringer
ISBN9780735408760
Pages532
BindingHardcover
LanguageEnglish
Publish YearJanuary 2011