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Substrate Surface Preparation Handbook

Substrate Surface Preparation Handbook
Books from same Author: Richard M De LA Rue
Books from same Publisher: Artech House

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Description

Substrate Surface Preparation serves as a practical, one-stop reference covering the technologies developed to produce flat surfaces with nanometer accuracy for the subsequent building of semiconductor devices and integrated circuits. This hands-on resource offers engineers detailed guidance in the entire substrate surface preparation process, from lapping and polishing...to specialized techniques and surface finishing. Supported with over 125 illustrations, this unique book provides a complete understanding of important maintenance methods and the full range of equipment available in the field. Practitioners gain the know-how and confidence they need to produce desired results when processing a sample of new material, rather than wasting time and money on a trial and error approach. Moreover, this authoritative book presents in-depth discussions on key applications, such as optics production and semiconductor de-lamination and deconstruction.

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General Information
Author(s)Richard M De LA Rue
PublisherArtech House
Edition1
ISBN9781608072132
Pages195
BindingHardcover
LanguageEnglish
Publish YearJanuary 2011
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