Description
Taylor & Francis Ltd Microelectronic Materials 1989 Edition by C.R.M. Grovenor
This practical book shows how an understanding of structure, thermodynamics, and electrical properties can explain some of the choices of materials used in microelectronics, and can assist in the design of new materials for specific applications. It emphasizes the importance of the phase chemistry of semiconductor and metal systems for ensuring the long-term stability of new devices. The book discusses single-crystal and polycrystalline silicon, aluminium- and gold-based metallisation schemes, packaging semiconductor devices, failure analysis, and the suitability of various materials for optoelectronic devices and solar cells. Semiconducting materials; contacts, devices and integrated circuits; the growth of single crystals of semiconducting materials; polycrystalline conducting thin films; the metallurgy of aluminium and gold based metallization schemes; deposition and properties of insulating films; the packaging of semiconductor devices; materials for optoelectronics devices; materials for solar cells; failure analysis and the investigation of the structure and composition of microelectronic materials.